PPT Slide

35

40

45

50

55

Time (

μ

s)

Zap YAG - On

Zap YAG - Off

Si

6

Si

5

Si

4

Si

3

Signal Intensity

Si6→Si5

Si6→Si4

Si6→Si3

Si4→Si3

Si5→Si4

Vap Laser : 2nd harmonics of Nd:YAG, 532nm, 10mJ/pulse

Ion Laser : Excimer Laser(ArF), 193nm, 14mJ/cm2

Zap Laser : 3rd harmonized Nd:YAG, 355nm, 40mJ/cm2

Spectra of fragmentation of Si6+

前のｽﾗｲﾄﾞ

次のｽﾗｲﾄﾞ

最初のｽﾗｲﾄﾞに戻る

ｸﾞﾗﾌｨｯｸｽの表示