In-situ Measurement of Film Thickness
Main drain tube
Sub drain tube
Quartz tube
Electric furnace
Pirani gauge
Vacuum pump
Substrate
Ethanol tank
Hot bath
Pressure manometer
Ar-H2
mixed gas
Laser
Prism
or
Mirror
Quartz tube
Electric furnace
Substrate
Laser light detector
PC
USB cable
Gas flow
S. Maruyama et al., CPL 403 (2005) 320.