Water Assisted Super-Growth
Iijima
Group (K. Hata et al., Science, 2004)
2.5
mm height
Catalysts: Al2O3 (10 nm)/Fe(1 nm)
Buffer: Ar (99.9999%) or He
(99.9999%)
with 40% H2 (99.99999%)
Water:175 ppm
Source: 100 sccm ethylene
(99.999%)
CVD Temp.: 750°C x 10 min